CEDRAT_TECH_catalogue2013 - Page 4 - Actuateurs piezo- Piezo actuatoren CEDRATTECHNOLOGIES Products CatalogVersion 4.1 4. SELECTION GUIDE FOR PIEZO ACTUATORS 51 4.1 Selection guide 51 4.1.1 Introduction 51 4.1.2 Options 52 4.1.3 Mechanical interface options 53 4.1.4 Additional data 54 4.1.5 Code description 54 ® UXS & XXS Series 55 ® XS Series 56 ® S Series 57 ® SM Series 58 ® M Series 59 ® M Series 60 ® MML Series 61 ® ML Series 62 ® L Series 63 ® XL Series 64 4.12 Multilayer Actuators MLA Series 65 4.13 Parallel Pre-Stressed Actuators PPA M Series 66 4.14 Parallel Pre-Stressed Actuators PPA L Series 67 4.15 Parallel Pre-Stressed Actuators PPA XL Series 68 5. SELECTION GUIDE FOR PIEZO MECHANISMS 71 5.1 Selection guide 71 5.2 X piezoelectric stages 72 5.3 XY piezoelectric stages 73 5.4 XYZ piezoelectric stages 74 75 76 5.7 Objective Piezo Positionner OPP120SM 77 5.8 Fast Piezo Shutters FPS200M, FPS400M & FPS900M 78 5.9 Linear Stepping Piezo Actuator LSPA 79 5.10 Linear Stepping Piezo Stage LSPS 80 5.11 Rotary Stepping Piezo Actuators RSPA 81 6. MAGNETIC ACTUATORS 83 6.1 MICA 84 6.2 MICA L and M series overview 84 6.3 BLMM 86 88 7. SELECTION GUIDE FOR DRIVERS 91 7.1 Selection guide 91 7.1.1 Introduction 91 7.1.2 Rack dimensions 92 7.1.3 Connections 93 7.1.4 Standard configurations 94 7.2 CA Standalone series for piezo actuators 95 7.2.1 Standalone series for piezo actuators 96 7.3 75 series AC/DC Converters for piezo actuators 97 98 COMPACT DYNAMIC PRECISECOMPACT DYNAMIC PRECISECOMPACT DYNAMIC PRECISE 5 99 7.5.1 Switching Power Amplifier series for piezo actuators 100 7.6 Switching Piezo Controller SPC45 101 7.7 24 SERIES AC/DC CONVERTER FOR MAGNETIC ACTUATORS 102 103 8. SELECTION GUIDE FOR SENSORS & ELECTRONIC CONTROLLERS FOR PIEZO ACTUATORS 105 8.1 Selection guide 105 8.2 Sensor probes 108 8.3 Sensor conditioners 110 8.3.1 Strain gauges conditioner 110 8.3.2 Eddy Current Sensor Conditioner 111 8.4 Digital Controllers 112 9. MECHATRONIC SOLUTIONS 115 9.1 Evaluation Pack EP120S 116 9.2 Educational kit ACV (Active Control of Vibrations) 117 9.3 LSPA30uXS Piezo Motor developer Kit 119 9.4 DEDICATED MECHATRONIC SOLUTIONS FOR MACHINE TOOLS 121 10. APPLICATION NOTES 123 10.1 Glossary of technical terms 123 10.1.1 Notes about the standard piezoelectric products shown in the catalogue 123 10.1.2 A few definitions concerning actuators 124 10.2 Your own application Selection guide 127 10.2.1 Step 1: Actuator 127 10.2.2 Step 2: Driving & control electronic 127 10.2.3 Step 3: Check your design using COMPACT Tool 129 10.3 Strain Gauges performances & properties 129 10.3.1 Definition 129 10.3.2 Performances & tests results 130 10.3.3 Summary of performances 131 10.4 Digital control 131 10.4.1 Building a general piezoelectric actuator model 131 10.4.2 Managing the performances of the control loop 132 10.4.3 Methodology to tune the controller 134 10.4.4 Note on the discretization of a continuous controller 135 LEGAL NOTICE 137 CEDRATTECHNOLOGIES Products CatalogVersion 4.1 COMPACT DYNAMIC PRECISECOMPACT DYNAMIC PRECISECOMPACT DYNAMIC PRECISE 7 1. CEDRAT TECHNOLOGIES ACTUATOR SOLUTIONS 1.1 INTRODUCTION TO PIEZO AND MAGNETIC ACTUATORS FROM CEDRAT TECHNOLOGIES CEDRAT TECHNOLOGIES has been constantly upgrading and enlarging its range of actuator & related electronic solutions since the middle of the 90s. In order to keep pace with its customers’ mechatronic systems, CEDRAT TECHNOLOGIES has been developing Compact, Dynamic and Precise components through several families of products: Piezo actuators (APA®, PPA & Mechanisms) working in strain mode, Piezo actuators (LSPA, RSPA & LSPS) working in stepping mode, Controllable magnetic actuators (MICA), Bistable magnetic actuators (BLMM), These actuators as well as the dedicated drivers, sensors and controllers are presented all along the sections of this catalogue. These actuators coupled with the relevant drive, sensor and controller offer a wide range of standard components and functions to build your own mechatronic systems requests and demanding environments, CEDRAT TECHNOLOGIES can develop both customised components and mechatronic systems under your CEDRATTECHNOLOGIES Products CatalogVersion 4.1 1.1.1 PARALLEL PRE-STRESSED ACTUATORS (PPA) PPA are solid-state linear Actuators (Figure 1.1). They only use the expansion of the active material, in 33-mode, to produce a useful displacement. This displacement is proportional to the voltage within a 170V range. Typically, the Actuator’s deformation is about 0.1% (1μm/mm), so their displacements are limited to about 100μm. However, the forces are naturally high, easily higher than 1kN. Parallel Pre-stressed Actuators (Figure 1.1) use an external deformable frame to pre-stress the ceramics. The level of prestress can be higher. PPA are cheaper, more compact and display a much better dynamic behaviour than conventional Direct Piezo Actuators. 1.1.2 AMPLIFIED PIEZOELECTRIC ACTUATORS (APA® ) APA® are solid-state long-stroke linear Actuators (Figure 1.2). They are based on the expansion of the active material and displacement is also proportional to the voltage within a 170V range. The advantages of APA® are their relatively large displacements combined with their high forces and compact size along the active axis. It leads to a deformation of 1% (10μm/mm) or more. Therefore, their stroke may achieve up to 1 mm. Thanks to their compactness, APA® can be stacked in series to reach strokes longer than 1mm. Since APA® are robust, they can also be used in dynamic applications, including in resonant devices. In this last case, the applicable voltage to get the maximum stroke is very low (about 1 to 10V). 1.1.3 STEPPING PIEZO ACTUATORS (SPA) Piezoelectric Actuators (APA® ). Stepping Piezoelectric Actuators (SPA) are new long-stroke piezoelectric motors for micro/nano ® heritage. They operate by accumulation of small steps. Between each step the actuator is locked in position. When the long stroke is performed, it can also be operated in a deformation mode for applied voltage, which leads to a nanometre resolution and a high bandwidth. SPA concept leads to different product families (LSPA, RSPA, LSPS...) which differ by their motion type (Linear or Rotating) and by the possible addition of a guiding (case of the Stages). Figure 1.1: View of a PPA Figure 1.2: View of APA® COMPACT DYNAMIC PRECISECOMPACT DYNAMIC PRECISE 9 1.1.4 MOVING IRON CONTROLLABLE ACTUATOR (MICA) Linear actuators: For applications where long strokes and highly dynamic actuators are required, CEDRAT TECHNOLOGIES develops BLMM. With strokes up to 10 mm, forces up to 1500N, MICA are perfectly complementary products to our well-known piezoelectric offer. MICA are robust, long lasting and powerful controllable actuators, with a force proportional to the current and can be used either for high frequencies or static applications. They come with an embedded position sensor and convenient mechanical interface for an easy integration. 1.1.5 BISTABLE LINEAR MOVING MAGNET (BLMM) BLMM are miniature bistable actuators offering low power consumption and a fast switching time. They are easy to control in on/off mode. These products are presented in the chapter 6 dedicated to Magnetic Actuators. Figure 1.4: View of MICA Figure 1.3: View of a LSPA CEDRATTECHNOLOGIES Products CatalogVersion 4.1 1.2 COMPARISON OF CEDRAT TECHNOLOGIES LINEAR ACTUATORS CEDRAT TECHNOLOGIES’s standard linear actuators cover a range of free displacements from 10 μm to 10 mm (Figure 1.5). They have been designed in order to offer the largest possible stroke while keeping a reasonable size. The choice between these different solutions should be made as a compromise between force and displacement. For example, considering an active height of about 17mm, one can choose between an APA200M, an APA40SM and a PPA10M, which offer quite different strokes and forces (Figure 1.6). Figure 1.6: Comparison of linear Piezo Actuators APA200M,PPA10M & APA40SM of CEDRAT TECHNOLOGIES with comparable size but different free displacements and blocked forces. Figure 1.5: Comparison of max displacements and forces of some linear actuators (PPA, APA® , LSPA, LSPS and MICA) from CEDRAT TECHNOLOGIES 17mmheight MICA LSPA LSPS APA® PPA Force (kN) 1010.1 Displacement (mm) 10 1 0.1 COMPACT DYNAMIC PRECISECOMPACT DYNAMIC PRECISE 11 1.3 SYNTHESIS OF CEDRAT TECHNOLOGIES OFFER AlltheproductsfromCEDRATTECHNOLOGIEScanbeassembled to build a complete mechatronic system (Figure 1.7). Note that mechanisms can produce larger stroke than the elementary actuators. All these electromechanical devices can be driven and controlled with the appropriate electronics. Figure 1.7: CEDRAT TECHNOLOGIES’s range of products Several solutions of piezo actuation exist: the choice depends on the required stroke and force. The advantages are high positioning accuracy, possible non-magnetic operation, fast response time, low power consumption. CEDRATTECHNOLOGIES Products CatalogVersion 4.1 COMPACT DYNAMIC PRECISECOMPACT DYNAMIC PRECISECOMPACT DYNAMIC PRECISE 13 2. TUTORIAL FOR PIEZOELECTRIC ACTUATORS 2.1 INTRODUCTION TO PIEZOELECTRIC MATERIALS piezoelectric effect on crystal materials, which has the ability to produce electrical charges in response to externally applied forces. This is called the direct effect. This effect is reciprocal; meaning that the piezoelectric material changes its dimensions under applied electrical charges. Actuator was driven at resonance. The discovery of piezoelectricity in PZT (lead zirconate titanate) in the late 1960’s increased the number of applications for industrial use. Piezoelectric transducers based on bulk PZT rings have been developed for sonar, ultrasonic welding, ultrasonic cleaning applications, etc. Sensor technology using piezoelectric ceramics (pressure or force sensors, hydrophones, accelerometers...) has matured since then. Based on piezoelectric bulk PZT rings, Actuators for positioning purposes have also been studied. However, to obtain the deformation level required for this type of applications, it is necessary to use high input voltages. For instance, 0.5 mm thick PZT rings require an excitation voltage of approximately one thousand volts, which is clearly too high for several practical purposes. Multilayer Actuators (MLAs), derived from the high capacitor technology, were introduced on the market in 1988 to circumvent the previous limitations (Figure 2.1). Because MLAs are easy to operate, they have been increasingly used in various applications. The required excitation voltage of 150 Volts or less is well adapted to modern electronics. These new materials are used by CEDRAT TECHNOLOGIES to build high energy density actuators and other devices, which are available either as standard or customised products, and which can be supplied with the dedicated electronics.
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